Concepedia
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Publications
1
Citations
18
H-Index
Active since
1988
Luyan Lin is an author specializing in semiconductor wafer inspection, optical lithography, and optoelectronics.
Publications per year
1988–1988
Patterned wafer inspection using laser holography and spatial frequency filtering
D. L. Cavan, Luyan Lin, R. B. Howe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17
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