Concepedia
Statistics
Publications
1
Citations
18
H-Index
Active since
1988
D. L. Cavan is an author specializing in optical lithography, holography, and optical imaging.
Publications per year
1988–1988
Patterned wafer inspection using laser holography and spatial frequency filtering
D. L. Cavan, Luyan Lin, R. B. Howe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17
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