Concepedia
Statistics
Publications
4
Citations
107
H-Index
Active since
2021
Affiliations
SK Group (South Korea)(Current)
Kyung Hee University
Hanyang University
Korea Institute of Science and Technology
Yongjoo Park is an author at SK Group (South Korea) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceThin FilmsNanoelectronicsSurface ScienceMicroelectronicsChemistryMaterials EngineeringElectrical Engineering
Publications per year
2021–2024
Atomic-layer deposition of TiO2 thin films with a thermally stable (CpMe5)Ti(OMe)3 precursor
Hong Keun Chung, Sung Ok Won, Yongjoo Park et al. · Applied Surface Science · 2021 · 38 citations · Full text
Materials Science, High Thermal Stability, High Temperature Materials +15
Y-doped HfO2 deposited by atomic layer deposition using a cocktail precursor for DRAM capacitor dielectric application
Jenam Kim, Byung Seok Kim, Aejin Lee et al. · Ceramics International · 2021 · 36 citations
Materials Engineering, Materials Science, Electrical Engineering +12
Atomic layer chemical vapor deposition of SiO2 thin films using a chlorine-free silicon precursor for 3D NAND applications
GeonHo Baek, Ji-hoon Baek, Hye-Mi Kim et al. · Ceramics International · 2021 · 20 citations
Materials Science, Engineering, Nanoelectronics +11
Suppressing Interfacial Layer Formation in ZrO<sub>2</sub>-Based Capacitors with TiN Electrodes via a MgO Thin-Film Oxygen Diffusion Barrier
Seungwoo Lee, Hyeon Ho Seol, Min Kyeong Nam et al. · ACS Applied Electronic Materials · 2024 · 13 citations
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