Hye-Mi Kim

Highly Dense and Stable p-Type Thin-Film Transistor Based on Atomic Layer Deposition SnO Fabricated by Two-Step Crystallization

Hye-Mi Kim, Su‐Hwan Choi, Hyun‐Jun Jeong et al. · ACS Applied Materials & Interfaces · 2021 · 51 citations

Sno Tfts, Engineering, Tin Monoxide +20

Area-Selective Atomic Layer Deposition of Ruthenium Using a Novel Ru Precursor and H₂O as a Reactant

Hye-Mi Kim, Jung-Hoon Lee, Seung-Hwan Lee et al. · Chemistry of Materials · 2021 · 29 citations

Engineering, Solid-state Chemistry, Chemistry +16

Atomic layer chemical vapor deposition of SiO2 thin films using a chlorine-free silicon precursor for 3D NAND applications

GeonHo Baek, Ji-hoon Baek, Hye-Mi Kim et al. · Ceramics International · 2021 · 20 citations

Materials Science, Engineering, Nanoelectronics +11

High-Temperature Stable Amorphous Sn-Rich InSnGaO Thin Films Fabricated Via Atomic Layer Deposition for Next-Generation Dynamic Random-Access Memory Applications

Seong‐Hwan Ryu, Hye-Mi Kim, Kwang Hee Lee et al. · Nano Letters · 2024 · 12 citations

Facile rearrangement of molecular layer deposited metalcone thin films by electron beam irradiation for area selective atomic layer deposition

Seung-Hwan Lee, GeonHo Baek, Hye-Mi Kim et al. · Dalton Transactions · 2021 · 11 citations