Wei-Yuan Chang

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Active since

2014

Affiliations

National Yang Ming Chiao Tung University(Current)

Wei-Yuan Chang is an author at National Yang Ming Chiao Tung University specializing in materials engineering, applied physics, and chemical engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceUltraviolet LightChemical EngineeringElectrical InsulationElectrical PropertiesMaterials EngineeringElectrical Engineering

Publications per year

2014–2018

Publications

Effect of UV curing time on physical and electrical properties and reliability of low dielectric constant materials

Kai-Chieh Kao, Wei-Yuan Chang, Yu-Min Chang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 14 citations

Materials Engineering, Materials Science, Electrical Engineering +14

Broadband UV-assisted thermal annealing of low-<i>k</i> silicon carbonitride films using a C-rich silazane precursor

Wei-Yuan Chang, Hau-Ting Chung, Yi-Chang Chen et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2018 · 10 citations

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