Concepedia
Statistics
Publications
1
Citations
10
H-Index
Active since
2018
Affiliations
National Yang Ming Chiao Tung University(Current)
Hau-Ting Chung is an author at National Yang Ming Chiao Tung University.
Publications per year
2018–2018
Broadband UV-assisted thermal annealing of low-<i>k</i> silicon carbonitride films using a C-rich silazane precursor
Wei-Yuan Chang, Hau-Ting Chung, Yi-Chang Chen et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2018 · 10 citations
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