Concepedia
Statistics
Publications
2
Citations
73
H-Index
Active since
2009
Affiliations
IBM (United States)(Current)
Toshiba (United States)
Dave Horak is an author at IBM (United States) specializing in microelectronics, engineering, and integrated circuit fabrication.
Publications per year
2009–2010
Integration of EUV lithography in the fabrication of 22-nm node devices
Obert R. Wood, Chiew-Seng Koay, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 51 citations · Full text
Engineering, Electrical Engineering, Materials Science +16
EUV lithography at the 22nm technology node
Obert R. Wood, Chiew-Seng Koay, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 22 citations
Engineering, Computer Engineering, Electrical Engineering +17
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