9
Publications
301
Citations
9
H-Index
2008
Active since
Affiliations
Takeo Nakano is an author at Tohoku University specializing in engineering, applied physics, and molecular dynamics.
Top concepts
EngineeringApplied PhysicsMolecular DynamicsBiophysicsChemistryTransport PhenomenaPhysicsThermodynamicsNatural SciencesHeat Transfer
Publications per year
2008–2023
9
9
High-volume manufacturing equipment and processing for directed self-assembly applications
Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 22 citations
Engineering, Electron-beam Lithography, Pattern Transfer +18
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1–5 of 9