Statistics
Publications
8
Citations
233
H-Index
8
Active since
1997
D. Lu is an author at Institute of Microelectronics specializing in materials science, materials engineering, and natural sciences.
Publications per year
1997–2020
8
8
M.E. Kazemi, Logesh Shanmugam, Ali Dadashi et al. · Composites Part B Engineering · 2020 · 105 citations
Natural Sciences, Materials Engineering, Materials Science +14
Influence of plasma treatment on low-k dielectric films in semiconductor manufacturing
Ping Yang, D. Lu, R. Kumar et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +16
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