C. J. Kang

Development of a real-time tunable stiffness and damping vibration isolator based on magnetorheological elastomer

Guojiang Liao, X-L Gong, Shouhu Xuan et al. · Journal of Intelligent Material Systems and Structures · 2011 · 183 citations

Vibration Isolator, Engineering, Vibrations +15

Sub-0.1 μm nitride hard mask open process without precuring the ArF photoresist

Jin Su Kim, Yun-Sook Chae, W. S. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 68 citations

Optical Materials, Engineering, Microscopy +18

Multi-Level NAND Flash Memory with 63 nm-Node TANOS (Si-Oxide-SiN-Al2O3-TaN) Cell Structure

C.-H. Lee, Jaehyuck Choi, C. J. Kang et al. · 2006 · 36 citations

Non-volatile Memory, Cell Structure, Engineering +19

Exposed area ratio dependent etching in a submicron self-aligned contact etching

Jihye Kim, Cheng-Jye Chu, C. J. Kang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 10 citations

Engineering, Submicron Self-aligned Contact, Pattern Transfer +17