Cheng-Jye Chu is an author at Samsung (South Korea) specializing in surface science, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical EngineeringElectronic Packaging
Publications per year
2002–2002
1
1
Exposed area ratio dependent etching in a submicron self-aligned contact etching
Jihye Kim, Cheng-Jye Chu, C. J. Kang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 10 citations
Engineering, Submicron Self-aligned Contact, Pattern Transfer +17
Rows per page
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