Concepedia

Jianlin Chen

JC

3

Publications

82

Citations

3

H-Index

2018

Active since

Affiliations

Tohoku University(Current)

Jianlin Chen is an author at Tohoku University specializing in instrumentation, engineering, and sensor design.

ORCID

Top concepts

Publications per year

2018–2021

3

Publications

3

Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam

Jianlin Chen, Takashiro Tsukamoto, Shuji Tanaka · Journal of Microelectromechanical Systems · 2021 · 32 citations

, , +13

Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure

Cong Liu, Joerg Froemel, Jianlin Chen et al. · Microsystem Technologies · 2018 · 28 citations

, , +9

Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Jianlin Chen, Takashiro Tsukamoto, Shuji Tanaka · 2019 · 22 citations

, , +9

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