Takashi Soga

Performance evaluation of NEC SX-9 using real science and engineering applications

Takashi Soga, Akihiro Musa, Youichi Shimomura et al. · 2009 · 45 citations

Engineering, Computer Engineering, High-performance Computing +17

Prevention of Resist Pattern Collapse by Resist Heating during Rinsing

Toshihiko Tanaka, Mitsuaki Morigami, Hiroaki Oizumi et al. · Journal of The Electrochemical Society · 1994 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +6

New Dry Surface-Imaging Process for X-Ray Lithography

Taro Ogawa, Atsuko Yamaguchi, Takashi Soga et al. · Japanese Journal of Applied Physics · 1994 · 27 citations

Engineering, Materials Engineering, Materials Science +12

Parallel processing of the Building-Cube Method on a GPU platform

Kazuhiko Komatsu, Takashi Soga, Ryusuke Egawa et al. · Computers & Fluids · 2011 · 17 citations

Computing, Computer Science, High-performance Computing +16

Self‐Developing Characteristics of Si Containing Polymers and Their Application to X‐Ray Lithography

Atsuko Yamaguchi, Taro Ogawa, Hiroaki Tachibana et al. · Journal of The Electrochemical Society · 1996 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17