Kow-Ming Chang

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Publications

Citations

244

H-Index

Active since

1993

Affiliations

National Yang Ming Chiao Tung University(Current)

Institute of Electronics

Kow-Ming Chang is an author at National Yang Ming Chiao Tung University specializing in semiconductor devices, engineering, and semiconductor materials.

Publications per year

1993–2006

Publications

Amorphouslike chemical vapor deposited tungsten diffusion barrier for copper metallization and effects of nitrogen addition

Kow-Ming Chang, Ta‐Hsun Yeh, I‐Chung Deng et al. · Journal of Applied Physics · 1997 · 55 citations

Engineering, Materials Engineering, Materials Science +17

Investigation of indium–tin-oxide ohmic contact to p-GaN and its application to high-brightness GaN-based light-emitting diodes

Kow-Ming Chang, Jiunn-Yi Chu, Chao-Chen Cheng · Solid-State Electronics · 2005 · 45 citations

Engineering, Electrical Engineering, Materials Science +14

Electrical properties of SiN/GaN MIS diodes formed by ECR-CVD

Kow-Ming Chang, Chao-Chen Cheng, C.C. Lang · Solid-State Electronics · 2002 · 41 citations

Engineering, Materials Engineering, Materials Science +12

Nitridation of fine grain chemical vapor deposited tungsten film as diffusion barrier for aluminum metallization

Kow-Ming Chang, Ta‐Hsun Yeh, I‐Chung Deng · Journal of Applied Physics · 1997 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +15

Highly selective etching for polysilicon and etch-induced damage to gate oxide with halogen-bearing electron-cyclotron-resonance plasma

Kow-Ming Chang, Ta‐Hsun Yeh, I‐Chung Deng et al. · Journal of Applied Physics · 1996 · 28 citations

Engineering, Electrical Engineering, Materials Science +16

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