Takashi Mineta

An active guide wire with shape memory alloy bending actuator fabricated by room temperature process

Takashi Mineta, Toshiaki Mitsui, Yoshiyuki Watanabe et al. · Sensors and Actuators A Physical · 2002 · 82 citations

Materials Science, Engineering, Active Guide Wire +10

Flash-evaporated TiNiCu thick film for shape memory alloy micro actuator

Takashi Mineta, Kouji Kasai, Yuki Sasaki et al. · Microelectronic Engineering · 2008 · 37 citations

Materials Science, Materials Engineering, Engineering +8

Electrochemical etching of a shape memory alloy using new electrolyte solutions

Takashi Mineta · Journal of Micromechanics and Microengineering · 2003 · 35 citations

Engineering, Electrode-electrolyte Interface, Sma Sheet +20

Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist

Terutake Hayashi, Takayuki Shibata, Takahiro Kawashima et al. · Sensors and Actuators A Physical · 2008 · 33 citations

Active Gray-tone Mask, Engineering, Beam Lithography +8

Measurement of Three Dimensional Stress and Modeling of Stress Induced Migration Failure in Aluminum Interconnects

Atsumu Tezaki, Takashi Mineta, Hidesitsu Egawa et al. · Reliability physics · 1990 · 25 citations

Electromigration Technique, Reliability Engineering, Engineering +12