Concepedia

K. Maβeli

KM

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Publications

2

Citations

29

H-Index

2

Active since

1985

Affiliations

Siemens (Germany)(Current)

K. Maβeli is an author at Siemens (Germany) specializing in applied physics, nanoelectronics, and microfabrication.

Top concepts

Publications per year

1985–1986

2

Publications

2

Secondary effects of single crystalline silicon deep- trench etching in a chlorine-containing plasma for 3- dimensional capacitor cells

Ivo W. Rangelow, Per-Anders Thorén, K. Maβeli et al. · Microelectronic Engineering · 1986 · 18 citations

, , +9

SIMS and AES investigations of contamination effects by RIE of PIQ layers

Ivo W. Rangelow, K. Maβeli, Ludwig Niewöhner et al. · Microelectronic Engineering · 1985 · 11 citations

, , +2

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