Per-Anders Thorén

Local surface mechanical properties of PDMS-silica nanocomposite probed with Intermodulation AFM

Hui Huang, Illia Dobryden, Per-Anders Thorén et al. · Composites Science and Technology · 2017 · 51 citations

Materials Science, Engineering, Mechanical Properties +9

From force curves to surface nanomechanical properties

Per M. Claesson, Illia Dobryden, Gen Li et al. · Physical Chemistry Chemical Physics · 2017 · 36 citations · Full text

Imaging high-speed friction at the nanometer scale

Per-Anders Thorén, Astrid S. de Wijn, Riccardo Borgani et al. · Nature Communications · 2016 · 23 citations · Full text

Engineering, Microscopy, Mechanical Engineering +18

Secondary effects of single crystalline silicon deep- trench etching in a chlorine-containing plasma for 3- dimensional capacitor cells

Ivo W. Rangelow, Per-Anders Thorén, K. Maβeli et al. · Microelectronic Engineering · 1986 · 18 citations

Materials Science, Chlorine-containing Plasma, Engineering +9

Computer simulation of pattern profiles through physical etching with shadow, trenching, and redeposition

Ivo W. Rangelow, Per-Anders Thorén, R. Kissing · Microelectronic Engineering · 1985 · 13 citations

Geometric Modeling, Engineering, Physical Etching +11