Concepedia

Xiaodong Luan

XL

Statistics

Publications

5

Citations

119

H-Index

5

Active since

2014

Affiliations

Hebei University of Technology(Current)

Ocean University of China

Institute of Microelectronics

Xiaodong Luan is an author at Hebei University of Technology specializing in engineering, materials engineering, and slurries.

Publications per year

2014–2024

5

Publications

5

A study on exploring the alkaline copper CMP slurry without inhibitors to achieve high planarization efficiency

Xiaodong Luan, Yuling Liu, Chenwei Wang et al. · Microelectronic Engineering · 2016 · 39 citations

Engineering, Materials Engineering, Materials Science +8

Investigation of the barrier slurry with better defect performance and facilitating post-CMP cleaning

Xiaodong Luan, Yuling Liu, Baoguo Zhang et al. · Microelectronic Engineering · 2016 · 37 citations

Engineering, Materials Engineering, Materials Processing +9

Stability of weakly alkaline barrier slurry with the high selectivity

Xiaodong Luan, Yuling Liu, Chenwei Wang et al. · Microelectronic Engineering · 2014 · 17 citations

Engineering, Chemical Engineering, Surface Science +4

Effects of organic compounds rich in phosphate functional groups as multifunctional inhibitors on copper film chemical-mechanical polishing properties: Combined experiment and theoretical calculation

Changxin Dong, Xinhuan Niu, Chao He et al. · Tribology International · 2024 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +16

The effects of α-sodium alkenesulfonate and alkylphenol polyoxyethylene ether phosphate on the inhibition of copper chemical mechanical polishing

Tongtong Zhang, Yuling Liu, Hongdong Zhao et al. · Materials Science in Semiconductor Processing · 2024 · 10 citations

Natural Sciences, Chemistry, Materials Science +7

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