Concepedia

Y. H. Wang

YH

Statistics

Publications

2

Citations

33

H-Index

2

Active since

2002

Affiliations

Institute of Microelectronics(Current)

Y. H. Wang is an author at Institute of Microelectronics specializing in chemical engineering, thin films, and materials science.

Top concepts

Publications per year

2002–2004

2

Publications

2

Reduction of Oxygen Plasma Damage by Postdeposition Helium Plasma Treatment for Carbon-Doped Silicon Oxide Low Dielectric Constant Films

Y. H. Wang, D. Gui, Rakesh Kumar et al. · Electrochemical and Solid-State Letters · 2002 · 20 citations

, , +15

Stability of Carbon-Doped Silicon Oxide Low-k Thin Films

Y. H. Wang, R. Kumar · Journal of The Electrochemical Society · 2004 · 13 citations

, , +12

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