Concepedia

Y. Zhong

YZ

Statistics

Publications

3

Citations

105

H-Index

3

Active since

1989

Affiliations

North Carolina State University(Current)

Y. Zhong is an author at North Carolina State University specializing in silicon, semiconductor device materials, and chemical vapor deposition materials.

Publications per year

1989–1990

3

Publications

3

Selective low-pressure chemical vapor deposition of Si1−<i>x</i>Ge<i>x</i> alloys in a rapid thermal processor using dichlorosilane and germane

Y. Zhong, Mehmet C. Öztürk, Douglas T. Grider et al. · Applied Physics Letters · 1990 · 52 citations

, , +15

Rapid thermal chemical vapor deposition of germanium on silicon and silicon dioxide and new applications of ge in ULSI technologies

Mehmet C. Öztürk, Douglas T. Grider, J. J. Wortman et al. · Journal of Electronic Materials · 1990 · 37 citations

, , +14

Low-Pressure Chemical Vapor Deposition of Polycrystalline Silicon and Silicon Dioxide By Rapid Thermal Processing

Mehmet C. Öztürk, Jimmie J. Wortman, Y. Zhong et al. · MRS Proceedings · 1989 · 16 citations

, , +16

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