Rajeev Rajendran

RESCAN: an actinic lensless microscope for defect inspection of EUV reticles

Iacopo Mochi, Patrick Helfenstein, István Mohácsi et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 32 citations · Full text

Engineering, Microscopy, High Throughput +21

Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging

Patrick Helfenstein, Rajeev Rajendran, Iacopo Mochi et al. · Optics Express · 2018 · 26 citations · Full text

Short Wavelength Optic, Engineering, Beam Drift +22

Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology

Patrick Helfenstein, István Mohácsi, Rajeev Rajendran et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 22 citations · Full text

Scdi Algorithm, Engineering, Microscopy +18

Actinic inspection of EUV reticles with arbitrary pattern design

Iacopo Mochi, Patrick Helfenstein, Yasin Ekinci et al. · 2017 · 19 citations

Engineering, Microscopy, Demo Tool +21

Direct Femtosecond Laser Processing for Generating High Spatial Frequency LIPSS (HSFL) on Borosilicate Glasses with Large-Area Coverage

Rajeev Rajendran, E. R. Krishnadev, K. K. Anoop · Photonics · 2023 · 17 citations · Full text

Optical Materials, Engineering, Optical Glass +27