Patrick Helfenstein

Highly collimated electron beams from double-gate field emitter arrays with large collimation gate apertures

Patrick Helfenstein, Eugenie Kirk, Konstantins Jefimovs et al. · Applied Physics Letters · 2011 · 34 citations · Full text

Electron Collimation, Electrical Engineering, Plasma Electronics +15

RESCAN: an actinic lensless microscope for defect inspection of EUV reticles

Iacopo Mochi, Patrick Helfenstein, István Mohácsi et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 32 citations · Full text

Engineering, Microscopy, High Throughput +21

Surface composition and photometric properties of Triton.

R. H. Brown, D. P. Cruikshank, J. Veverka et al. · 1995 · 27 citations

Surface Characterization, Engineering, Optical Properties +4

Electron beam collimation with a 40 000 tip metallic double-gate field emitter array and in-situ control of nanotip sharpness distribution

Patrick Helfenstein, Vitaliy A. Guzenko, Hans‐Werner Fink et al. · Journal of Applied Physics · 2013 · 26 citations

Engineering, Electron-beam Lithography, Nanotip Sharpness Distribution +17

Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging

Patrick Helfenstein, Rajeev Rajendran, Iacopo Mochi et al. · Optics Express · 2018 · 26 citations · Full text

Short Wavelength Optic, Engineering, Beam Drift +22