Concepedia

Kenji Yakushiji

KY

5

Publications

82

Citations

5

H-Index

1992

Active since

Affiliations

Showa Denko (Japan)(Current)

Nagoya University

Kenji Yakushiji is an author at Showa Denko (Japan) specializing in engineering, x-ray spectroscopy, and physics.

Top concepts

EngineeringPhysicsX-ray SpectroscopySpectroscopyApplied PhysicsMaterial ScienceOptical PropertiesCrystalline DefectsHealthMicroscopy

Publications per year

1992–1999

5

Publications

5

A New Method for the Precise Measurement of Wafer Roll off of Silicon Polished Wafer

Masahiro Kimura, Yasuo Saito, Hiroshi Daio et al. · Japanese Journal of Applied Physics · 1999 · 26 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

Main Peak Profiles of Total Reflection X-Ray Fluorescence Analysis of Si(001) Wafers Excited by Monochromatic X-Ray Beam W-Lβ (II)

Kenji Yakushiji, Shinji Ohkawa, Atsushi Yoshinaga et al. · Japanese Journal of Applied Physics · 1993 · 20 citations

X-ray Spectroscopy, Engineering, Trace Metal Impurities +17

Spurious Peaks in Total Reflection X-Ray Fluorescence Analysis

Kenji Yakushiji, Shinji Ohkawa, Atsushi Yoshinaga et al. · Analytical Sciences · 1995 · 13 citations

X-ray Spectroscopy, Engineering, Physics +8

Main Peak Profiles of Total Reflection X-Ray Fluorescence Analysis of Si(001) Wafers Excited by Monochromatic X-Ray Beam W-Lβ (I)

Kenji Yakushiji, Shinji Ohkawa, Atsushi Yoshinaga et al. · Japanese Journal of Applied Physics · 1992 · 13 citations

X-ray Crystallography, Materials Science, Diffraction Phenomenon +15

Origins of Spurious Peaks of Total Reflection X-Ray Fluorescence Analysis of Si Wafers Excited by Monochromatic X-Ray Beam W-Lβ

Kenji Yakushiji, Shinji Ohkawa, Atsushi Yoshinaga et al. · Japanese Journal of Applied Physics · 1994 · 10 citations

Optical Materials, X-ray Spectroscopy, Engineering +18

Rows per page

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