Concepedia

Hiroshi Daio

HD

3

Publications

54

Citations

3

H-Index

1993

Active since

Affiliations

Showa Denko (Japan)(Current)

Hiroshi Daio is an author at Showa Denko (Japan) specializing in engineering, microfabrication, and microelectronics.

Top concepts

Publications per year

1993–2000

3

Publications

3

A New Method for the Precise Measurement of Wafer Roll off of Silicon Polished Wafer

Masahiro Kimura, Yasuo Saito, Hiroshi Daio et al. · Japanese Journal of Applied Physics · 1999 · 26 citations

, , +15

Dependence of Minority-Carrier Recombination Lifetime on Surface Microroughness in Silicon Wafers

Hiroshi Daio, Fumio Shimura · Japanese Journal of Applied Physics · 1993 · 17 citations

, , +19

Photoconductivity characterization of silicon wafer mirror-polishing subsurface damage related to gate oxide integrity

Yoh-Ichiro Ogita, Kenichi Kobayashi, Hiroshi Daio · Journal of Crystal Growth · 2000 · 11 citations

, , +9

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