Concepedia

Yoh-Ichiro Ogita

YO

Statistics

Publications

10

Citations

212

H-Index

10

Active since

1980

Affiliations

Kanagawa Institute of Technology(Current)

Tokyo Electron (Japan)

Yoh-Ichiro Ogita is an author at Kanagawa Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceElectrical EngineeringThin FilmsOptoelectronicsMicroelectronicsElectronic PackagingPhysics

Publications per year

1980–2011

10

Publications

10

Bulk lifetime and surface recombination velocity measurement method in semiconductor wafers

Yoh-Ichiro Ogita · Journal of Applied Physics · 1996 · 72 citations

Engineering, Pulse Laser Excitation, Semiconductor Device +17

Al2O3 formation on Si by catalytic chemical vapor deposition

Yoh-Ichiro Ogita, Shinshi Iehara, Toshiyuki Tomita · Thin Solid Films · 2003 · 25 citations

Materials Engineering, Materials Science, Chemical Engineering +6

The mechanism of alumina formation from TMA and molecular oxygen using catalytic-CVD with an iridium catalyzer

Yoh-Ichiro Ogita, Toshiyuki Tomita · Thin Solid Films · 2005 · 19 citations

Materials Science, Inorganic Chemistry, Engineering +9

Electrical properties of alumina films grown on Si at low temperature using catalytic CVD

Yoh-Ichiro Ogita, Satoshi Ohsone, Tsugutomo Kudoh et al. · Thin Solid Films · 2007 · 18 citations

Materials Science, Aluminium Nitride, Electrical Engineering +9

The mechanism of alumina formation from TMA and molecular oxygen using Catalytic-CVD with a tungsten catalyzer

Yoh-Ichiro Ogita, Toshiyuki Tomita · Thin Solid Films · 2005 · 15 citations

Materials Science, Catalytic Application, Engineering +8

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