3
Publications
69
Citations
3
H-Index
1978
Active since
Affiliations
Institute of Semiconductor Physics(Current)
L. L. Vasilyeva is an author at Institute of Semiconductor Physics specializing in materials science, surface science, and engineering.
Top concepts
EngineeringSurface ScienceMaterial ScienceChemistryThin FilmsApplied PhysicsNanotechnologyChemical KineticsChemical EngineeringMaterials Engineering
Publications per year
1978–1998
3
3
Deposition of silica films by the oxidation of silane in oxygen
L. L. Vasilyeva, V.N. Drozdov, S.M. Repinsky et al. · Thin Solid Films · 1978 · 21 citations
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1–3 of 3