Baimei Tan

Insights into triazole derivatives as potential corrosion inhibitors in CMP process: Experimental evaluation and theoretical analysis

Wei Li, Baimei Tan, Shihao Zhang et al. · Applied Surface Science · 2022 · 112 citations

Materials Science, Inorganic Chemistry, Chemical Engineering +10

Corrosion control of copper wiring by barrier CMP slurry containing azole inhibitor: Combination of simulation and experiment

Tengda Ma, Baimei Tan, Yi Xu et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2020 · 86 citations

Materials Science, Chemical Engineering, Copper Wiring +7

Effect of arginine-based cleaning solution on BTA residue removal after Cu-CMP

Qi Wang, Da Yin, Baohong Gao et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2019 · 56 citations

Chemical Engineering, Engineering, Environmental Engineering +7

Theoretical and electrochemical analysis on inhibition effect of benzotriazole and 1,2,4-triazole on cobalt surface

Da Yin, Yang Liu, Xinhuan Niu et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2020 · 50 citations

Inorganic Chemistry, Chemical Engineering, Cobalt Surface +8

Synergistic effect of composite complex agent on BTA removal in post CMP cleaning of copper interconnection

Da Yin, Yang Liu, Tengda Ma et al. · Materials Chemistry and Physics · 2020 · 46 citations

Materials Science, Copper Interconnection, Chemical Engineering +8