Statistics
Publications
3
Citations
123
H-Index
3
Active since
2002
Affiliations
Stanford University(Current)
D. Taner Bilir is an author at Stanford University specializing in engineering, applied physics, and electrical engineering.
Publications per year
2002–2012
3
3
Submicron thermocouple measurements of electron-beam resist heating
Dachen Chu, D. Taner Bilir, R. F. W. Pease et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 38 citations
Engineering, Electron-beam Lithography, Kv Electron Beam +19
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