Concepedia

N. Miura

NM

Statistics

Publications

2

Citations

26

H-Index

2

Active since

1997

Affiliations

IBM Research - Tokyo(Current)

N. Miura is an author at IBM Research - Tokyo specializing in applied physics, engineering, and electrical engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationElectrical EngineeringMicroscopyNanoelectronicsSurface ScienceMaterial ScienceElectronic Packaging

Publications per year

1997–1998

2

Publications

2

A plasma-polymerized protective film for transmission electron microscopy specimen preparation by focused ion beam etching

N Kato, N. Miura, Naganori Tsutsui · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 15 citations

Fib Fabrication, Engineering, Electron-beam Lithography +18

Cross-Sectional Tem Sample Preparation Method Using Fib Etching for Thin-Film Transistor

K. Tsujimoto, S. Tsuji, H. Takatsuji et al. · MRS Proceedings · 1997 · 11 citations

Electrical Engineering, Engineering, Thin-film Transistor +9

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