Statistics
Publications
2
Citations
93
H-Index
2
Active since
1966
Affiliations
ShinEtsu Chemical (Japan)(Current)
Shigeru Maruyama is an author at ShinEtsu Chemical (Japan) specializing in microfabrication, coulomb interaction, and nanoelectronics.
Publications per year
1966–1996
2
2
Multielectron beam blanking aperture array system SYNAPSE-2000
Hiroshi Yasuda, Soichiro Arai, Jun-ichi Kai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 38 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
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