Jun-ichi Kai - Concepedia

Author

Jun-ichi Kai

Also Known As

J. Kai, Jun-ichi Kai, Junichi Kai, Junichi Kai Junichi Kai

Publications

Citations

H-Index

Concepts

All Affiliations

Jun-ichi Kai is an author at Fujitsu (Japan) specializing in applied physics, electrical engineering, and microelectronics.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	67
2	Applied Physics	2	2	67
3	Electrical Engineering	2	2	67
4	Integrated Circuits	2	2	67
5	Materials Fabrication	1	1	38

Jun-ichi Kai

Publications

Citations

H-Index

Page 1

	Year	Citations
Multielectron beam blanking aperture array system SYNAPSE-2000 Hiroshi Yasuda, Soichiro Arai, Jun-ichi Kai, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographySensor ArrayMicroscopyIon Beam Instrumentation	1996	38
Fast Electron Beam Lithography System with 1024 Beams Individually Controlled by Blanking Aperture Array Hiroshi Yasuda, Soichiro Arai, Jun-ichi Kai, Japanese Journal of Applied Physics Electrical EngineeringBaa ExposureEngineeringElectron-beam LithographyRandom Patterning	1993	29

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