Concepedia

Chii-Guang Lee

CL

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Publications

1

Citations

14

H-Index

1

Active since

1997

Affiliations

Lam Research (United States)(Current)

Chii-Guang Lee is an author at Lam Research (United States) specializing in aluminum alloys, thin oxide films, and etching processes.

Publications per year

1997–1997

1

Publications

1

Characterization of an aluminum etching process in an inductively coupled discharge using measurements of discharge impedance and current and voltage sensors

Roger Patrick, Chii-Guang Lee, Steven E. Hilliker et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 14 citations

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