Concepedia

Steven E. Hilliker

SE

Statistics

Publications

1

Citations

14

H-Index

1

Active since

1997

Affiliations

Lam Research (United States)(Current)

Steven E. Hilliker is an author at Lam Research (United States) specializing in etching processes, aluminum alloys, and total pressure.

Publications per year

1997–1997

1

Publications

1

Characterization of an aluminum etching process in an inductively coupled discharge using measurements of discharge impedance and current and voltage sensors

Roger Patrick, Chii-Guang Lee, Steven E. Hilliker et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 14 citations

, , +17

1–1 of 1