Concepedia

Kevin A. McKinley

KA

2

Publications

132

Citations

2

H-Index

1996

Active since

Affiliations

Lam Research (United States)(Current)

Kevin A. McKinley is an author at Lam Research (United States) specializing in materials science, materials engineering, and engineering.

Top concepts

EngineeringMaterial ScienceMaterials EngineeringApplied PhysicsNanoelectronicsSurface ScienceMicroelectronicsChemical Engineering

Publications per year

1996–1997

2

Publications

2

Tantalum pentoxide for advanced DRAM applications

Kevin A. McKinley, Nathan P. Sandler · Thin Solid Films · 1996 · 77 citations

Materials Engineering, Materials Science, Engineering +3

Evidence that N<sub>2</sub>O is a Stronger Oxidizing Agent than O<sub>2</sub> for the Post-Deposition Annealing of Ta<sub>2</sub>O<sub>5</sub> on Si Capacitors

W. S. Lau, Peng Wei Qian, Nathan P. Sandler et al. · Japanese Journal of Applied Physics · 1997 · 55 citations

Post-deposition Annealing, Engineering, Oxidation Resistance +17

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