Concepedia

Ming Feng Shieh

MF

2

Publications

32

Citations

2

H-Index

2005

Active since

Affiliations

United Microelectronics (Taiwan)(Current)

Xilinx (United States)

Luminex (United States)

Ming Feng Shieh is an author at United Microelectronics (Taiwan) specializing in technology, computer engineering, and optoelectronics.

Top concepts

Technology3D PrintingEngineeringOptoelectronicsMicroelectronicsMicrofabricationOptical TolerancingComputer EngineeringApplied PhysicsNanolithography

Publications per year

2005–2006

2

Publications

2

Inverse lithography technology at chip scale

Benjamin S. Lin, Ming Feng Shieh, Jie-wei Sun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 19 citations

Engineering, Electron-beam Lithography, Optic Design +17

Real-world impact of inverse lithography technology

Jonathan Ho, Yan Wang, Xin Wu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 13 citations

Engineering, Production Environment, Beam Lithography +14

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