Harsh Mehta

Using the temperature dependence of resonator quality factor as a thermometer

Matthew A. Hopcroft, Bohye Kim, Saurabh A. Chandorkar et al. · Applied Physics Letters · 2007 · 67 citations

Engineering, Mechanical Engineering, Metrology +16

Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators

Manu Agarwal, Harsh Mehta, Robert N. Candler et al. · Journal of Applied Physics · 2007 · 58 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11

Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy

C.M. Jha, Gaurav Bahl, Renata Melamud et al. · TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference · 2007 · 57 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

A study of electrostatic force nonlinearities in resonant microstructures

Manu Agarwal, Saurabh A. Chandorkar, Harsh Mehta et al. · Applied Physics Letters · 2008 · 54 citations

Engineering, Electrical Engineering, Physics +16

High resolution microresonator-based digital temperature sensor

C.M. Jha, Gaurav Bahl, Renata Melamud et al. · Applied Physics Letters · 2007 · 51 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16