D. Feijóo

Causes and Prevention of Temperature-Dependent Bubbles in Silicon Wafer Bonding

Kiyoshi Mitani, Volker Lehmann, R. Stengl et al. · Japanese Journal of Applied Physics · 1991 · 86 citations

Engineering, Silicon On Insulator, Bubble Nucleation +16

Characterization of silicon surfaces and interfaces by optical vibrational spectroscopy

Yves J. Chabal, Melissa A. Hines, D. Feijóo · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 53 citations

Optical Materials, Engineering, Optoelectronic Devices +19

Silicon wafer bonding studied by infrared absorption spectroscopy

D. Feijóo, Yves J. Chabal, S. B. Christman · Applied Physics Letters · 1994 · 37 citations

Engineering, Hydrophobic Wafers, Integrated Circuits +18

Implanted Carbon: An Effective Etch‐Stop in Silicon

V. Lehmann, Kiyoshi Mitani, D. Feijóo et al. · Journal of The Electrochemical Society · 1991 · 15 citations

Materials Science, Etch‐rate Measurements, Electronic Devices +11

Strained Silicon-On-Insulator - Fabrication and Characterization

Manfred Reiche, Cameliu Himcinschi, U. Gösele et al. · ECS Transactions · 2007 · 14 citations · Full text

Materials Engineering, Electrical Engineering, Engineering +11