11
Publications
418
Citations
11
H-Index
2002
Active since
Thomas Overstolz is an author at Swiss Center for Electronics and Microtechnology (Switzerland) specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMicrofabricationBiomedical EngineeringNeuroscienceBioelectronicsNeurophysiologySocial SciencesSurface Science
Publications per year
2002–2024
11
11
Lifetime assessment of RbN_3-filled MEMS atomic vapor cells with Al_2O_3 coating
Sylvain Karlen, J. Gobet, Thomas Overstolz et al. · Optics Express · 2017 · 61 citations · Full text
A clean wafer-scale chip-release process without dicing based on vapor phase etching
Thomas Overstolz, P.-A. Clerc, Wilfried Noell et al. · 2004 · 43 citations
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