Concepedia

Author

M. Tormen

Swiss Center for Electronics and Microtechnology (Switzerland)

Also Known As

M. Tormen, Maurizio Tormen

29

Publications

173

Citations

7

H-Index

8

Concepts

All Affiliations

Swiss Center for Electronics and Microtechnology (Switzerland)École Polytechnique Fédérale de LausannePolytechnique Montréal
MT

About

M. Tormen is an author at Swiss Center for Electronics and Microtechnology (Switzerland) specializing in nanolithography, materials science, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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2

Applied Physics

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1

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3

Materials Science

1

1

15

4

Microelectronics

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15

5

Nanofabrication

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15

M. Tormen

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4

Publications

122

Citations

4

H-Index

YearCitations

Vibration and shock reliability of MEMS: modeling and experimental validation

Subramanian Sundaram, M. Tormen, B. Timotijević,

Journal of Micromechanics and Microengineering

2011

53

Deformable MEMS grating for wide tunability and high operating speed

M. Tormen, Yves-Alain Peter, Philippe Niedermann,

Journal of Optics A Pure and Applied Optics

2006

34

Deformable MEMS grating for wide tunability and high operating speed

M. Tormen, Yves-Alain Peter, Philippe Niedermann,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2006

20

Sub-100μs nanoimprint lithography at wafer scale

Massimo Tormen, Enrico Sovernigo, Alessandro Pozzato,

Microelectronic Engineering

2015

15

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