Concepedia

M. Tormen

MT

4

Publications

122

Citations

4

H-Index

2006

Active since

Affiliations

Swiss Center for Electronics and Microtechnology (Switzerland)(Current)

École Polytechnique Fédérale de Lausanne

Polytechnique Montréal

M. Tormen is an author at Swiss Center for Electronics and Microtechnology (Switzerland) specializing in nanolithography, materials science, and applied physics.

Top concepts

Publications per year

2006–2015

4

Publications

4

Vibration and shock reliability of MEMS: modeling and experimental validation

Subramanian Sundaram, M. Tormen, B. Timotijević et al. · Journal of Micromechanics and Microengineering · 2011 · 53 citations · Full text

Deformable MEMS grating for wide tunability and high operating speed

M. Tormen, Yves-Alain Peter, Philippe Niedermann et al. · Journal of Optics A Pure and Applied Optics · 2006 · 34 citations

Deformable MEMS grating for wide tunability and high operating speed

M. Tormen, Yves-Alain Peter, Philippe Niedermann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 20 citations

Sub-100μs nanoimprint lithography at wafer scale

Massimo Tormen, Enrico Sovernigo, Alessandro Pozzato et al. · Microelectronic Engineering · 2015 · 15 citations

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