4
Publications
56
Citations
4
H-Index
1999
Active since
Affiliations
University of Illinois Chicago(Current)
Tatjana Danković is an author at University of Illinois Chicago specializing in engineering, microfabrication, and microelectronics.
Top concepts
EngineeringInstrumentationMicroelectronicsMicrofabricationElectrical EngineeringApplied PhysicsIntegrated CircuitsMechanical EngineeringVacuum Plasma TechnologyPhysics
Publications per year
1999–2014
4
4
Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
Tomasz Grzebyk, Anna Górecka-Drzazga, Jan Dziuban et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 14 citations
Electrical Engineering, Mems-type Pirani Sensor, Engineering +13
Rows per page
1–4 of 4