Concepedia

Z.Lisa Zhang

ZZ

1

Publications

269

Citations

1

H-Index

1994

Active since

Affiliations

Cornell University(Current)

Z.Lisa Zhang is an author at Cornell University specializing in micromanufacturing, microfabrication, and integrated circuits.

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Publications per year

1994–1994

1

Publications

1

SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures

K.A. Shaw, Z.Lisa Zhang, Noel C. MacDonald · Sensors and Actuators A Physical · 1994 · 269 citations · Full text

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