Concepedia

E. I. Bromley

EI

Statistics

Publications

6

Citations

299

H-Index

6

Active since

1983

Affiliations

Massachusetts Institute of Technology(Current)

MIT Lincoln Laboratory

E. I. Bromley is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicrofabricationMicroscopyThin FilmsNanolithographyMicroelectronicsMaterials Engineering

Publications per year

1983–1990

6

Publications

6

A technique for the determination of stress in thin films

E. I. Bromley, John N. Randall, D. C. Flanders et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 171 citations

Materials Science, Engineering, Mechanical Properties +15

High resolution ion beam lithography at large gaps using stencil masks

John N. Randall, D. C. Flanders, N. P. Economou et al. · Applied Physics Letters · 1983 · 36 citations

Ion Beam Lithography, Engineering, High Resolution +19

Silicon nitride stencil masks for high resolution ion lithography proximity printing

John N. Randall, D. C. Flanders, N. P. Economou et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 24 citations

Ion Implantation, Ion Beam Lithography, Grid Support Mask +12

Nitrocellulose as a positive or negative self-developing resist

M. W. Geis, John N. Randall, R. W. Mountain et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 23 citations

Materials Engineering, Materials Science, Dry Nitrogen +10

Composition of Tungsten Silicide Films Deposited by Dichlorosilane Reduction of Tungsten Hexafluoride

Tohru Hara, Takaaki Miyamoto, Hiroyuki Hagiwara et al. · Journal of The Electrochemical Society · 1990 · 23 citations

Materials Engineering, Inorganic Chemistry, Chemical Engineering +15

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