Marco Steinert

Publications

422

Citations

H-Index

2005

Active since

Affiliations

Leibniz Institute for Solid State and Materials Research(Current)

GlobalFoundries (Germany)

Marco Steinert is an author at Leibniz Institute for Solid State and Materials Research specializing in chemical engineering, chemistry, and surface science.

Top concepts

ChemistryEngineeringSurface ScienceChemical EngineeringApplied PhysicsHydrogenMicroelectronicsMicrofabricationChemical KineticsMaterial Science

Publications per year

2005–2012

Publications

Study on the Mechanism of Silicon Etching in HNO3-Rich HF/HNO3 Mixtures

Marco Steinert, J. Acker, Stefan Oswald et al. · The Journal of Physical Chemistry C · 2007 · 125 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Experimental Studies on the Mechanism of Wet Chemical Etching of Silicon in HF∕HNO[sub 3] Mixtures

Marco Steinert, J. Acker, Antje Henßge et al. · Journal of The Electrochemical Society · 2005 · 94 citations

Engineering, Chemistry, Silicon On Insulator +19

Reactive Species Generated during Wet Chemical Etching of Silicon in HF/HNO3 Mixtures

Marco Steinert, J. Acker, Matthias Krause et al. · The Journal of Physical Chemistry B · 2006 · 92 citations

Materials Engineering, Chemical Engineering, Engineering +15

New Aspects on the Reduction of Nitric Acid during Wet Chemical Etching of Silicon in Concentrated HF/HNO3 Mixtures

Marco Steinert, J. Acker, K. Wetzig · The Journal of Physical Chemistry C · 2008 · 43 citations

Chemical Engineering, Wet Chemical Etching, Engineering +11

Mass and Electron Balance for the Oxidation of Silicon during the Wet Chemical Etching in HF/HNO3 Mixtures

J. Acker, Anja Rietig, Marco Steinert et al. · The Journal of Physical Chemistry C · 2012 · 42 citations

Electron Balance, Engineering, Oxidation Resistance +18

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