Statistics
Publications
4
Citations
229
H-Index
4
Active since
1996
Affiliations
University of California, Berkeley(Current)
Fan Piao is an author at University of California, Berkeley specializing in materials science, materials engineering, and optical materials.
Publications per year
1996–2000
4
4
<title>Material limitations to 193-nm lithographic system lifetimes</title>
Richard E. Schenker, Fan Piao, W.G. Oldham · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 24 citations
Natural Sciences, Materials Engineering, Materials Science +12
Phase-shifting point-diffraction interferometry at 193 nm
Sang Hun Lee, Patrick Naulleau, Kenneth A. Goldberg et al. · Applied Optics · 2000 · 15 citations
Natural Sciences, Materials Engineering, Materials Science +17
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