Michel A. Rosa

A novel external electrode configuration for the electrostatic actuation of MEMS based devices

Michel A. Rosa, Dirk De Bruyker, A. R. Völkel et al. · Journal of Micromechanics and Microengineering · 2004 · 64 citations

Engineering, Mechanical Engineering, Microactuator +17

High voltage thin film transistors integrated with MEMS

Eugene M. Chow, Jeng Ping Lu, Jackson Ho et al. · Sensors and Actuators A Physical · 2005 · 34 citations

Electrical Engineering, Engineering, Applied Physics +5

Enhanced electrostatic force generation capabilityof angled comb finger design used in electrostatic comb-drive actuators

Michel A. Rosa, Sima Dimitrijev, H.B. Harrison · Electronics Letters · 1998 · 27 citations

Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design

Michel A. Rosa, Sima Dimitrijev, H.B. Harrison · Journal of Intelligent Material Systems and Structures · 1998 · 19 citations

Electrical Engineering, Engineering, Soft Robotics +15

Self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques

Michel A. Rosa, Nam Quoc Ngo, D. Sweatman et al. · IEEE Journal of Selected Topics in Quantum Electronics · 1999 · 13 citations · Full text

Photonics, Waveguides, Optical Materials +15