Concepedia

Silvio Teuber

ST

2

Publications

26

Citations

2

H-Index

2005

Active since

Affiliations

Advanced Mask Technology Center (Germany)(Current)

Silvio Teuber is an author at Advanced Mask Technology Center (Germany) specializing in optical systems, optical properties, and optical materials.

Top concepts

EngineeringApplied PhysicsOptical SystemsMaterial ScienceOptical MaterialsOptical PropertiesMedicineMicroscopyOphthalmologyOptoelectronics

Publications per year

2005–2005

2

Publications

2

Determination of mask-induced polarization effects occurring in hyper NA immersion lithography

Silvio Teuber, Karsten Bubke, I. Höllein et al. · Optical Microlithography XVIII · 2005 · 13 citations

Optical Materials, Engineering, Electron-beam Lithography +19

Investigation of polarization effects on new mask materials

Karsten Bubke, Silvio Teuber, Ingo Hoellein et al. · Optical Microlithography XVIII · 2005 · 13 citations

Optical Materials, Engineering, Electron-beam Lithography +16

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