Concepedia

Manabu Kanemoto

MK

5

Publications

152

Citations

5

H-Index

1995

Active since

Affiliations

Hanyang University(Current)

Manabu Kanemoto is an author at Hanyang University specializing in engineering, mechanical engineering, and materials science.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringMicrofabricationMaterial ProcessingChemical EngineeringSurface ScienceSurface ModificationMaterials EngineeringElectrical Engineering

Publications per year

1995–2007

5

Publications

5

Electrostatic levitator for hard disk media

Lu Jin, Toshiro Higuchi, Manabu Kanemoto · IEEE Transactions on Industrial Electronics · 1995 · 69 citations

Electrical Engineering, Electrohydrodynamics, Engineering +12

Control of lithium metal anode cycleability by electrolyte temperature

Masashi Ishikawa, Manabu Kanemoto, Masayuki Morita · Journal of Power Sources · 1999 · 31 citations

Materials Science, Electrical Engineering, Engineering +6

Effect of Alkaline Agent in Colloidal Silica Slurry for Polycrystalline Silicon Chemical Mechanical Polishing

Myung-Yoon Lee, Hyun-Goo Kang, Manabu Kanemoto et al. · Japanese Journal of Applied Physics · 2007 · 28 citations

Silicate Ceramics, Engineering, Mechanical Engineering +18

Effects of Calcination and Milling Process Conditions for Ceria Slurry on Shallow-Trench-Isolation Chemical–Mechanical Polishing Performance

Jun‐Seok Kim, Hyun-Goo Kang, Manabu Kanemoto et al. · Japanese Journal of Applied Physics · 2007 · 14 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Effects of the Size and the Concentration of the Abrasive in a Colloidal Silica (SiO2) Slurry with Added TMAH on Removal Selectivity of Polysilicon and Oxide Films in Polysilicon Chemical Mechanical Polishing

Kyung-Woong Park, Hyun-Goo Kang, Manabu Kanemoto et al. · Journal of the Korean Physical Society · 2007 · 10 citations

Materials Engineering, Materials Science, Chemical Engineering +12

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