Concepedia

Kyung-Woong Park

KP

1

Publications

10

Citations

1

H-Index

2007

Active since

Affiliations

Hanyang University(Current)

Kyung-Woong Park is an author at Hanyang University specializing in microfabrication, mechanical engineering, and material processing.

Top concepts

EngineeringSurface ScienceMaterial ScienceMicrofabricationMaterial ProcessingChemical EngineeringSurface ModificationMaterials EngineeringMechanical Engineering

Publications per year

2007–2007

1

Publications

1

Effects of the Size and the Concentration of the Abrasive in a Colloidal Silica (SiO2) Slurry with Added TMAH on Removal Selectivity of Polysilicon and Oxide Films in Polysilicon Chemical Mechanical Polishing

Kyung-Woong Park, Hyun-Goo Kang, Manabu Kanemoto et al. · Journal of the Korean Physical Society · 2007 · 10 citations

Materials Engineering, Materials Science, Chemical Engineering +12

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