Concepedia

Author

Kyung-Woong Park

Hanyang University

Also Known As

Kyung-Woong Park

2

Publications

12

Citations

2

H-Index

9

Concepts

All Affiliations

Hanyang University
KP

About

Kyung-Woong Park is an author at Hanyang University specializing in microfabrication, mechanical engineering, and material processing.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Chemical Engineering

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Materials Engineering

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Materials Science

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Mechanical Engineering

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Kyung-Woong Park

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1

Publications

10

Citations

1

H-Index

YearCitations

Effects of the Size and the Concentration of the Abrasive in a Colloidal Silica (SiO2) Slurry with Added TMAH on Removal Selectivity of Polysilicon and Oxide Films in Polysilicon Chemical Mechanical Polishing

Kyung-Woong Park, Hyun-Goo Kang, Manabu Kanemoto,

Journal of the Korean Physical Society

2007

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