J. Fung Chen is an author at ASML (United States) specializing in laser applications, nanophotonics, and optical characterization.
Top concepts
PhotonicsMicroscopy3D PrintingEngineeringNanophotonicsApplied PhysicsOptical SystemsMaterial ScienceOptical MaterialsOrganic Photonics
Publications per year
2002–2002
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Complex 2D pattern lithography at λ/4 resolution using chromeless phase lithography (CPL)
Douglas J. Van Den Broeke, J. Fung Chen, Thomas L. Laidig et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 13 citations
Optical Materials, Engineering, Electron-beam Lithography +24
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