Yaru Ding

Atomic precision lithography on Si

John N. Randall, Joseph W. Lyding, Scott Schmucker et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 60 citations

Engineering, Electron-beam Lithography, Microscopy +19

Wake-Up Free La-Doped HfO₂-ZrO₂ Ferroelectrics Achieved With an Atomic Layer-Specific Doping Technique

Zeping Weng, Yiming Qu, Zhangsheng Lan et al. · IEEE Electron Device Letters · 2022 · 23 citations

Re-Examination of Hot Carrier Degradation Mechanism in Ultra-Scaled nFinFETs

Yaru Ding, Chu Yan, Yiming Qu et al. · IEEE Electron Device Letters · 2022 · 17 citations

Atomic precision patterning on Si: An opportunity for a digitized process

John N. Randall, Joshua B. Ballard, Joseph W. Lyding et al. · Microelectronic Engineering · 2009 · 16 citations

Precision Measurement, Engineering, Quantum Computing +12

Physical Study of Low-frequency TDDB Lifetime Deterioration in Advanced FinFETs

Chu Yan, Yaru Ding, Yiming Qu et al. · 2024 · 10 citations